The scintillator disclosed in this document is a detection system with a single-stage configuration. 8,895,935 is available as a prior patent document about an on-axis scintillator. Direct detection by the scintillator is free from the above-described bottleneck and provides a detection system which is easy to attain a good SN ratio. In order to solve the above-described problems, a scintillator arranged on the beam axis may be used, instead of using the above-described target plate 205 arranged on the beam axis. The SN ratio of an output is expressed by A symbol F 1 represents a noise factor in a process in which the tertiary electrons, which have been emitted from the target plate 205 by the incident secondary electrons, are converted into the light, and a symbol F 2 represents a noise factor in a process in which the light, generated in the scintillator 206, is converted into the electrons by the PMT 208. 18 is a graph showing SN-ratio deterioration factor in these signal detection processes. The light penetrates through the light guide 207 to reach the PMT 208, where the light is converted into electrons again. The tertiary electrons are accelerated and enter the scintillator 206, where the tertiary electrons are converted into light. First, the secondary electrons, which are signal sources, collide with the target plate 205, and tertiary electrons are emitted. Target-type signal detection processes include conversion processes in several stages.
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